Machlin, E.S.  . <br/><br/>
Materials science in microelectronics /  
by E.S. Machlin. 
 - 2nd ed /  
 - Oxford :   Elsevier Ltd. ,   2006 
 - 255p ;  
<br/><br/><label>ISBN: </label>0-080-44639-6 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics
<br/><br/><label>Dewey Class. No.: </label>C  / P6.2