| 000 | 00500nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 211115s9999 xx 000 0 und d | ||
| 020 | _a0-19-569327-2 | ||
| 041 | _aeng | ||
| 082 |
_aC9B,N(F0 _bP8 |
||
| 100 | _aTaniguchi, Norio . | ||
| 245 | 0 |
_aNanotecnologyu integrated processing system for ultra-precision and ultra-fine products / _cedited by Norio Taniguchi. |
|
| 260 |
_aNew Delhi : _bOxford University Press , _c2008 |
||
| 300 | _axiv, 406p : | ||
| 650 | _aNanotechnology | ||
| 942 | _cTB | ||
| 999 |
_c63921 _d63921 |
||