| 000 | 00442nam a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 211115s9999 xx 000 0 und d | ||
| 020 | _a0-080-44639-6 | ||
| 041 | _aeng | ||
| 082 |
_aC _bP6.2 |
||
| 100 | _aMachlin, E.S. . | ||
| 245 | 0 |
_aMaterials science in microelectronics / _cby E.S. Machlin. |
|
| 250 | _a2nd ed / | ||
| 260 |
_aOxford : _bElsevier Ltd. , _c2006 |
||
| 300 | _a255p ; | ||
| 650 | _aMicroelectronics | ||
| 942 | _cTB | ||
| 999 |
_c65820 _d65820 |
||